Microdischarge Device Fabricated In Silicon By Micromachining Technique with Pyramidal Cavity
نویسندگان
چکیده
This paper reports a novel silicon micromachined microdischarge device. The device is comprised of a bulk micromachined cathode substrate and a metal anode, separated by a dielectric layer. This device produces light emission from the cavity in a noble gas under a large DC bias. Stable operation has been observed over a wide range of operating pressures. Arrays as large as 10×10 have been observed.
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